Contact

Search

EN

Groups

ZETTA (Film Photomask AOI)

A device that automatically inspects film photomasks used in PCB/FPD/LED exposure processes and semiconductor manufacturing processes by optical methods.

ZT-1000L-HS

Features
  • Customizable inspection area implementation to meet specific customer requirements
  • High-speed inspection capability powered by advanced high-speed cameras and high-performance software
  • Rapid CAM reference generation enabling swift response to multi-product manufacturing environments
  • Offline defect viewer for defect analysis and management
  • Pseudo color imaging feature for enhanced defect visibility and identification
  • Glass mask and film mask inspection capabilities
  • Real-time auto-focus image acquisition system
  • Large-size film inspection capability
Specifications
CAM Interface
ODB++, GDS-II, RS-274D/X (Gerber), DPF, Fire-9xxx, DNS RP/RPH
Maximum product size
610 x 810 mm
Minimum L/S
9 / 9 µm
Resolution
1.5 µm
Weight
About 2,500 kg
Dimension
1800 (W) x 2500 (D) x 1800 (H) mm

ZT-1000L

Features
  • Customizable inspection area implementation to meet specific customer requirements
  • High-speed inspection capability powered by advanced high-speed cameras and high-performance software
  • Rapid CAM reference generation enabling swift response to multi-product manufacturing environments
  • Offline defect viewer for defect analysis and management
  • Pseudo color imaging feature for enhanced defect visibility and identification
Specifications
CAM Interface
ODB++, GDS-II, RS-274D/X (Gerber), DPF, Fire-9xxx, DNS RP/RPH
Maximum product size
610 x 630 mm (Standard)
Minimum L/S
32 / 32 µm
Resolution
4~8 µm
Weight
About 1,500 kg
Dimension
1362 (W) x 1860 (D) x 1575 (H) mm
Product Inquiry

Nullam quis risus eget urna mollis ornare vel eu leo. Aenean lacinia bibendum nulla sed 

  • @lighthouzz.kit
Facebook Twitter Youtube Instagram Linkedin