Contact

Search

EN

Groups

TRINITY (Glass Photomask AOI)

A device that automatically inspects defects present on patterns formed on glass photomasks using optical equipment and dedicated image processing software

TR-1100L

Features
  • Customizable inspection area implementation to meet specific customer requirements
  • Pellicle-mounted mask inspection support
  • Real-time auto-focus image acquisition system
  • Optimized alignment algorithms minimizing false alarms
  • Pseudo color imaging feature for enhanced defect visibility and identification
  • Multiple inspection capability for enhanced detection performance
  • Rapid CAM reference generation enabling swift response to multi-product manufacturing environments
  • Advanced parallel image processing technology for fine pattern inspection
  • Offline defect viewer for defect analysis and management
  • Foreign material inspection feature without CAM data
  • High-speed inspection capability powered by advanced high-speed cameras and high-performance software
  • Die-to-Die (DTD) functionality
Specifications
CAM Interface
ODB++, GDS-II, RS-274D/X (Gerber), DPF, Fire-9xxx, DNS RP/RPH
Maximum product size
228 x 228 mm
CD
0.8 / 0.8 µm
Resolution
0.195 / 0.31 µm
Weight
About 3,500 kg
Dimension
1860 (W) x 1600 (D) x 2000 (H) mm

TR-1000L

Features
  • Customizable inspection area implementation to meet specific customer requirements
  • Pellicle-mounted mask inspection support
  • Real-time auto-focus image acquisition system
  • Optimized alignment algorithms minimizing false alarms
  • Pseudo color imaging feature for enhanced defect visibility and identification
  • Multiple inspection capability for enhanced detection performance
  • Rapid CAM reference generation enabling swift response to multi-product manufacturing environments
  • Advanced parallel image processing technology for fine pattern inspection
  • Offline defect viewer for defect analysis and management
  • Enhanced algorithms for superior foreign material detection
  • SMI algorithm integration for improved open/short defect detection
Specifications
CAM Interface
ODB++, GDS-II, RS-274D/X (Gerber), DPF, Fire-9xxx, DNS RP/RPH
Maximum product size
840 x 1190 mm
CD
1.8 / 1.8 µm
Resolution
0.28 / 0.44 µm
Weight
About 6,500 kg
Dimension
2200 (W) x 2600 (D) x 1700 (H) mm

TR-2000V

Features
  • Customizable inspection area implementation to meet specific customer requirements
  • Pellicle-mounted mask inspection support
  • Real-time auto-focus image acquisition system
  • Optimized alignment algorithms minimizing false alarms
  • Pseudo color imaging feature for enhanced defect visibility and identification
  • Multiple inspection capability for enhanced detection performance
  • Rapid CAM reference generation enabling swift response to multi-product manufacturing environments
  • Advanced parallel image processing technology for fine pattern inspection
  • Offline defect viewer for defect analysis and management
  • Large size glass inspection capability
Specifications
CAM Interface
ODB++, GDS-II, RS-274D/X (Gerber), DPF, Fire-9xxx, DNS RP/RPH
Maximum product size
1580 x 1580 mm
CD
2.4 / 2.4 µm
Resolution
0.3 / 0.6 / 1.2 µm
Weight
About 20,000 kg
Dimension
4800 (W) x 3000 (D) x 3450 (H) mm

TR-2000A

Features
  • Customizable inspection area implementation to meet specific customer requirements
  • Pellicle-mounted mask inspection support
  • Real-time auto-focus image acquisition system
  • Optimized alignment algorithms minimizing false alarms
  • Pseudo color imaging feature for enhanced defect visibility and identification
  • Multiple inspection capability for enhanced detection performance
  • Rapid CAM reference generation enabling swift response to multi-product manufacturing environments
  • Advanced parallel image processing technology for fine pattern inspection
  • Offline defect viewer for defect analysis and management
Specifications
CAM Interface
ODB++, GDS-II, RS-274D/X (Gerber), DPF, Fire-9xxx, DNS RP/RPH
Maximum product size
700 x 800 mm
CD
1.8 / 1.8 µm
Resolution
0.3 / 0.6 / 1.2 µm
Weight
About 4,500 kg
Dimension
2300 (W) x 2050 (D) x 1600 (H) mm

TR-1000A

Features
  • Customizable inspection area implementation to meet specific customer requirements
  • Pellicle-mounted mask inspection support
  • Real-time auto-focus image acquisition system
  • Optimized alignment algorithms minimizing false alarms
  • Pseudo color imaging feature for enhanced defect visibility and identification
  • Multiple inspection capability for enhanced detection performance
  • Rapid CAM reference generation enabling swift response to multi-product manufacturing environments
  • Advanced parallel image processing technology for fine pattern inspection
  • Offline defect viewer for defect analysis and management
Specifications
CAM Interface
ODB++, GDS-II, RS-274D/X (Gerber), DPF, Fire-9xxx, DNS RP/RPH
Maximum product size
610 x 610 mm
CD
1.8 / 1.8 µm
Resolution
0.3 / 0.6 / 1.2 µm
Weight
About 3,800 kg
Dimension
2080 (W) x 2280 (D) x 2070 (H) mm
Product Inquiry

Nullam quis risus eget urna mollis ornare vel eu leo. Aenean lacinia bibendum nulla sed 

  • @lighthouzz.kit
Facebook Twitter Youtube Instagram Linkedin